rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Rapid thermal and integrated processing VII
    sub title: symposium held April 13-15, 1998, San Francisco, California, U.S.A
  name:
    name part: Öztürk, Mehmet C.
  name:
    name part: Materials Research Society
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: pau
    date issued: 1998
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiii, 403 pages : illustrations ; 24 cm.
  note: editors, Mehmet C. Öztürk [and others].
  note: Includes bibliographical references and indexes.
  note: A Sterling Salute in honor of Leana Ahmed by Dr. Selina Ahmed, December, 1998.
  subject:
    topic: Semiconductors
    topic: Heat treatment
    topic: Congresses
  subject:
    topic: Semiconductor doping
    genre: Congresses
  subject:
    topic: Vapor-plating
    genre: Congresses
  subject:
    topic: Rapid thermal processing
    topic: Congresses
  related item:
    title info:
      title: Materials Research Society symposia proceedings ; v. 525
  identifier: 1558994319
  record info:
    record content source: LHL
    record creation date: 981020
    record change date: 20151021051805.0
    record identifier: in00001471176