Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Riley, Terrence J.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1997]
Series:	Materials Research Society symposia proceedings ; v. 470.
Subjects:	Semiconductors > Heat treatment > Congresses. Semiconductor doping > Congresses. Vapor-plating > Congresses. Rapid thermal processing > Congresses.

Description
Physical Description:	xi, 434 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references and indexes.
ISBN:	1558993746