Cover Image

Polycrystalline silicon for integrated circuits and displays /

Show other versions (1)
Bibliographic Details
Main Author: Kamins, Theodore I.
Format: Book
Language:English
Published: Boston : Kluwer Academic Publishers, [1998]
Edition:2nd ed.
Subjects:
Integrated circuits > Materials.
Silicon > Electric properties.
Description
Physical Description:xv, 378 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages [317]-368) and index.
ISBN:0792382242 (alk. paper)