Cover Image

In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Rosenthal, Peter A., Duncan, Walter Marvin, Woollam, John A.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [1998]
Series:Materials Research Society symposia proceedings ; v. 502.
Subjects:
Electronics > Materials > Congresses.
Manufacturing processes > Congresses.
Semiconductors > Congresses.
Thin films > Congresses.
Lasers > Industrial applications > Congresses.
Description
Physical Description:ix, 290 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558994076