Cover Image

Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Dunham, S. T. (Scott T.), Nelson, Jeffrey S. (Jeffrey Steven)
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [1998]
Series:Materials Research Society symposia proceedings ; v. 490.
Subjects:
Semiconductors > Mathematical models > Congresses.
Semiconductors > Defects > Congresses.
Solid state physics > Congresses.
Description
Physical Description:ix, 273 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558993959
ISSN:0272-9172 ;