Basic vacuum technology /
| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bristol ; Philadelphia :
Institute of Physics Pub.,
1998.
|
| Edition: | 2nd ed. |
| Subjects: |
| Physical Description: | xiv, 189 pages : illustrations ; 26 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0750304952 (hardcover : alk. paper) |