rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Defect recognition and image processing in semiconductors 1997
    sub title: proceedings of the 7th International Conference on Defect Recognition and Image Porcessing in Semiconductors (DRIP VII) held in Templin, Germany, 7-10 September 1997
  name:
    name part: International Conference on Defect Recognition and Image Processing in Semiconductors 1997 : Templin, Germany)
    role:
      role term: creator
  name:
    name part: Donecker, J.
  name:
    name part: Rechenberg, I.
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: enk
    date issued: 1998
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xx, 524 pages : illustrations ; 24 cm.
  note: edited by J. Donecker and I. Rechneberg.
  note: Includes bibliographical references and indexes.
  subject:
    topic: Semiconductors
    topic: Defects
    genre: Congresses
  subject:
    topic: Image processing
    genre: Congresses
  classification: TK7871.85 .I575 1997
  classification: 621.3815/2
  related item:
    title info:
      title: Institute of Physics conference series ; no. 160
  identifier: 0750305002 (alk. paper)
  identifier: 97049019
  record info:
    record content source: DLC
    record creation date: 971208
    record change date: 20151020101547.0
    record identifier: in00001433626