http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Defect recognition and image processing in semiconductors 1997
proceedings of the 7th International Conference on Defect Recognition and Image Porcessing in Semiconductors (DRIP VII) held in Templin, Germany, 7-10 September 1997
International Conference on Defect Recognition and Image Processing in Semiconductors 1997 : Templin, Germany)
edited by J. Donecker and I. Rechneberg.
Includes bibliographical references and indexes.
Institute of Physics conference series ; no. 160