Smart structures and materials 1998. Smart electronics and MEMS : 2-4 March 1998, San Diego, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio)
Other Authors:	Varadan, V. K., 1943-
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1998]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3328.
Subjects:	Microelectronics > Materials > Congresses. Smart materials > Congresses. Microelectromechanical systems > Congresses. Actuators > Congresses.