rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II
    sub title: 29-30 January 1998, San Jose, California
  title info:
    title: Flatness, roughness and discrete defects characterization for computer disks, wafers and falt panel displays two
  title info:
    title: Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays 2
  name:
    name part: Stover, John C.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1998
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: vii, 186 pages : illustrations ; 28 cm.
  note: John C. Stover, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductor wafers
    topic: Measurement
    topic: Congresses
  subject:
    topic: Surface roughness
    topic: Measurement
    topic: Congresses
  subject:
    topic: Flatness measurement
    topic: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 3275
  identifier: 0819427144
  record info:
    record content source: CUS
    record creation date: 980415
    record change date: 20151020064740.0
    record identifier: in00001411534