http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II
29-30 January 1998, San Jose, California
Flatness, roughness and discrete defects characterization for computer disks, wafers and falt panel displays two
Flatness, roughness and discrete defects characterization for computer disks, wafers and flat panel displays 2
Society of Photo-optical Instrumentation Engineers
John C. Stover, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3275