rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: 17th Annual Symposium on Photomask Technology and Management
    sub title: [proceedings] : 17-19 September, 1997, Redwood City, California
  name:
    name part: Symposium on Photomask Technology and Management 1997 : Redwood City, California)
    role:
      role term: creator
  name:
    name part: Reynolds, James A.
    name part: 1930-
  name:
    name part: Grenon, Brian J.
  name:
    name part: BACUS (Technical group)
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1998
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: ix, 554 pages : illustrations ; 28 cm.
  note: James A. Reynolds, Brian J. Grenon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology ; published by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Masks
    genre: Congresses
  subject:
    topic: Microlithography
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 3236
  identifier: 0819426695
  record info:
    record content source: LHL
    record creation date: 980324
    record change date: 20151020064738.0
    record identifier: in00001411530