| Tag |
First Indicator |
Second Indicator |
Subfields |
| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00001402627 |
| 005 |
20151020052127.0 |
| 008 |
960830s1997 fluaf b 001 0 eng |
| 010 |
|
|
|a 96043344
|
| 020 |
|
|
|a 0849394511 (acid-free paper)
|
| 035 |
|
|
|a (OCoLC)35397909
|
| 035 |
|
|
|9 AHM2701AM
|
| 040 |
|
|
|a DLC
|c DLC
|d TXA
|d UtOrBLW
|
| 049 |
|
|
|a TXAM
|
| 050 |
0 |
0 |
|a TK7836
|b .M33 1997
|
| 082 |
0 |
0 |
|a 621.3815/2
|2 20
|
| 100 |
1 |
|
|a Madou, Marc J.
|
| 245 |
1 |
0 |
|a Fundamentals of microfabrication /
|c Marc Madou.
|
| 264 |
|
1 |
|a Boca Raton, Fla. :
|b CRC Press,
|c [1997]
|
| 264 |
|
4 |
|c ©1997
|
| 300 |
|
|
|a 589 pages, 22 unnumbered pages of plates :
|b illustrations (some color) ;
|c 29 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 504 |
|
|
|a Includes bibliographical references (pages 565-569) and index.
|
| 650 |
|
0 |
|a Microelectronics
|x Design and construction.
|
| 650 |
|
0 |
|a Machining.
|
| 650 |
|
0 |
|a Microelectronic packaging.
|
| 650 |
|
0 |
|a Lasers
|x Industrial applications.
|
| 999 |
|
|
|a MARS
|
| 999 |
f |
f |
|s f6f9cc40-724f-3ed2-bb2b-ac54618bf548
|i 1356da4d-0c73-3525-b391-219d21b5edb3
|t 0
|
| 952 |
f |
f |
|p normal
|a Texas A&M University
|b College Station
|c Sterling C. Evans Library
|d Evans: Library Stacks
|t 0
|e TK7836 .M33 1997
|h Library of Congress classification
|i unmediated -- volume
|m A14821636986
|
| 998 |
f |
f |
|a TK7836 .M33 1997
|t 0
|l Evans: Library Stacks
|