Fundamentals of microfabrication /

Bibliographic Details
Main Author:	Madou, Marc J.
Format:	Book
Language:	English
Published:	Boca Raton, Fla. : CRC Press, [1997]
Subjects:	Microelectronics > Design and construction. Machining. Microelectronic packaging. Lasers > Industrial applications.

Description
Physical Description:	589 pages, 22 unnumbered pages of plates : illustrations (some color) ; 29 cm.
Bibliography:	Includes bibliographical references (pages 565-569) and index.
ISBN:	0849394511 (acid-free paper)