APA (7th ed.) Citation

Madou, M. J. (1997). Fundamentals of microfabrication. CRC Press.

Chicago Style (17th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication. Boca Raton, Fla.: CRC Press, 1997.

MLA (9th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication. CRC Press, 1997.

Warning: These citations may not always be 100% accurate.