1997 International Symposium on Microelectronics : proceedings : October 14-16, 1997, Pennsylvania Convention Center, Philadelphia, Pennsylvania /
| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Reston, Virginia :
IMAPS--International Microelectronics and Packaging Society,
[1997]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3235. |
| Subjects: |
| Physical Description: | xvii, 707 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0930815505 |