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MAM '97, abstracts booklet : European Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997.

Bibliographic Details
Corporate Authors: European Workshop: Materials for Advanced Metallization Villard-de-Lans, France, International Union for Vacuum Science, Technique and Applications, France. Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle, IEEE Electron Devices Society
Format: Conference Proceeding Book
Language:English
Published: Paris, France : Société française du vide, 1997.
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Metallizing > Congresses.
Semiconductor-metal boundaries > Congresses.
Métallisation > Congrès.
Contacts métal-semiconducteur > Congrès.
Integrated circuits > Very large scale integration > Design and construction.
Metallizing.
Semiconductor-metal boundaries.
Conference papers and proceedings.
Online Access:IEEE Xplore
Description
Item Description:"With the sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'éducation nationale, de l'enseignement supérieur et de la recherche, IEEE-EDS"--1st prelim. page.
"Supplément à la revue no 283"--Cover.
Physical Description:221 pages : illustrations ; 24 cm
Bibliography:Includes bibliographical references and index.
ISBN:0780339762
9780780339767