Cover Image

Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A. /

Bibliographic Details
Other Authors: Higashi, Gregg S.
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1997]
Series:Materials Research Society symposia proceedings.
Subjects:
Semiconductors > Surfaces > Congresses.
Surface preparation > Congresses.
Semiconductors > Cleaning > Congresses.
Surface chemistry > Congresses.
Description
Physical Description:xiii, 545 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558993819
ISSN:0272-9172 ;