APA (7th ed.) Citation

Higashi, G. S. (1997). Science and technology of semiconductor surface preparation: Symposium held April 1-3, 1997, San Francisco, California, U.S.A. Materials Research Society.

Chicago Style (17th ed.) Citation

Higashi, Gregg S. Science and Technology of Semiconductor Surface Preparation: Symposium Held April 1-3, 1997, San Francisco, California, U.S.A. Pittsburgh, Pa.: Materials Research Society, 1997.

MLA (9th ed.) Citation

Higashi, Gregg S. Science and Technology of Semiconductor Surface Preparation: Symposium Held April 1-3, 1997, San Francisco, California, U.S.A. Materials Research Society, 1997.