rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: International Workshop on Statistical Metrology
    sub title: [proceedings] : IWSM
  title info:
    title: Proceedings
  name:
    name part: International Workshop on Statistical Metrology.
    role:
      role term: creator
  name:
    name part: IEEE Electron Devices Society
  name:
    name part: Ōyō Butsuri Gakkai
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: nju
    date issued: 1996
    date issued: 2001
    issuance: continuing
  language:
    language term: eng
  physical description:
    form: print
    extent: volumes : illustrations ; 28 cm.
  note: sponsored by IEEE Electron Devices Society ; in cooperation with Japan Society of Applied Physics [and others].
  note: Description based on: 2nd (June 8, 1997).
  subject:
    topic: Semiconductors
    topic: Characterization
    topic: Statistical methods
    topic: Congresses
  subject:
    topic: Semiconductors
    topic: Measurement
    topic: Statistical methods
    topic: Congresses
  record info:
    record content source: VPI
    record creation date: 980106
    record change date: 20151020054614.0
    record identifier: in00001394867