Fabrication, characterization, and applications of nanometer-scale features within organomercaptan self-assembled monolayers /

Nanometer-scale features in organomercaptan self-assembled

Bibliographic Details
Main Author: Schoer, Jonathan Kevin
Format: Thesis Book
Language:English
Published: [Place of publication not identified] : [publisher not identified] ; 1997.
Subjects:
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Description
Summary:Nanometer-scale features in organomercaptan self-assembled
monolayers (SAMs) on Au(ill) substrates were prepared by
three methods: electrochemical enhancement of adventitious
defects, electrochemical enhancement of template-molecule-
induced pores, and scanning tunneling microscopy (STM)-
induced patterning. The resulting features were
characterized by electrochemistry, scanning electron
microscopy (STM), and electrochemical STM (ECSTM). Finally,
we applied STM-induced patterning methods to lithographic
fabrication of features with critical dimensions < 100 nm.
The results indicate that n-alkanethiols SAMs form excellent
lithographic resists and barrier layers to electron and mass
transfer. Further, the nanometer-scale features act as
nanometer-size electrodes. Measurements of the physical
dimensions of nanometer-scale features by STM can be combined
with microelectrode theory to calculate a value for the
limiting current. Comparison of this value with that
obtained directly from conventional electrochemistry
provides qualitative agreement. From in-depth studies of the
mechanistic aspects of STM- induced patterning of
organomercaptan SAMs we determined that this process is
controlled by a complex combination of parameters defined by
both the instrument and the chemical and physical properties
of materials in the vicinity of the tip. In particular, the
patterning is dependent on the magnitude and polarity of the
gap bias, the Coulomb dose, and the composition of the gap.
From this information we propose a detailed multi-step model
for STM-induced removal of nalkanethiol SAMs from Au
surfaces. The model is partially based on our observation
that high tip bias (> -+2.30 V) results in removal of SAMs by
Faradaic electrochemical processes in which the n-octadecyl
mercaptan monolayer is: (1)disrupted by the tip, (2)
electrochemically desorbed, and (3)removed by the
scanning action of the tip. Further, we determined that at
biases above a second threshold (-+4.0 V) the patterning
becomes irreproducible because the patterning mechanism
changes to field desorption or evaporation from the surface.
Finally, we showed that combining STM-induced patterning with
selective low-temperature chemical vapor deposition of Cu
allows metalation of features with critical dimensions as
small as 100 nm.
Item Description:Vita.
"Major Subject: Chemistry".
Physical Description:xvi, 222 leaves : illustrations ; 28 cm.
Issued also on microfiche from University Microfilms Inc.
Bibliography:Includes bibliographical references: pages 202-219.