Gate dielectrics and MOS ULSIs : principles, technologies, and applications /

Bibliographic Details
Main Author:	Hori, Takashi, 1956-
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, [1997]
Series:	Springer series in electronics and photonics. v. 34.
Subjects:	Integrated circuits > Ultra large scale integration. Dielectric devices. Metal oxide semiconductors. Silicon-on-insulator technology.

Description
Physical Description:	xiv, 352 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references (pages 325-341) and index.
ISBN:	3540631828 (Berlin : acid-free paper)
ISSN:	0172-5734 ;