rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Silicon-on-insulator technology
    sub title: materials to VLSI
  name:
    name part: Colinge, Jean-Pierre.
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: mau
    date issued: 1997
    edition: 2nd ed.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: x, 272 pages : illustrations ; 25 cm.
  note: by Jean-Pierre Colinge.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
  subject:
    topic: Silicon-on-insulator technology
  subject:
    topic: Integrated circuits
    topic: Very large scale integration
    topic: Materials
  classification: TK7871.85 .C758 1997
  classification: 621.3815/2
  identifier: 079238007X (alk. paper)
  identifier: 97035777
  record info:
    record content source: DLC
    record creation date: 970723
    record change date: 20151020055947.0
    record identifier: in00001392375