Handbook of vacuum science and technology /
| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
San Diego, CA :
Academic Press,
[1998]
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| Subjects: |
| Physical Description: | xxii, 835 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0123520657 (alk. paper) |