Handbook of vacuum science and technology /

Bibliographic Details
Other Authors: Hoffman, Dorothy M., -1996, Singh, Bawa, Thomas, John H.
Format: Book
Language:English
Published: San Diego, CA : Academic Press, [1998]
Subjects:
Description
Physical Description:xxii, 835 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0123520657 (alk. paper)