Cover Image

Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, National Institute of Standards and Technology (U.S.), Coalition for Intelligent Manufacturing Systems, Academic Coalition for Intelligent Manufacturing Systems
Other Authors: Sulzmann, Armin
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1998]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3202.
Subjects:
Robotics > Congresses.
Microelectromechanical systems > Congresses.
Microfabrication > Congresses.
Description
Physical Description:x, 238 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819426342