Micromachining and microfabrication process technology III : 29-30 September 1997, Austin, Texas /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Solid State Technology (Organization)
Other Authors:	Pang, Stella W., Chang, Shih-Chia
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1997]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3223.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses.

Description
Physical Description:	ix, 310 pages : illustrations ; 28 cm.
ISBN:	0819426555 9780819426550