Micromachining and imaging : 13 February 1997, San Jose, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, United States. Defense Advanced Research Projects Agency
Other Authors:	Michalske, Terry A., Wendman, Mark A.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1997]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3009.
Subjects:	Micromachining > Congresses. Scanning probe microscopy > Congresses. Microwave imaging > Congresses.

Description
Physical Description:	v, 152 pages : illustrations (some color) ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	081942420X