Laser applications in microelectronic and optoelectronic manufacturing II : 10-12 February 1997, San Jose, California /
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[1997]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2991. |
| Subjects: |
| Physical Description: | ix, 294 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819424021 |