Cover Image

IEEE, the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots, Nagoya, Japan, January 26-30, 1997 /

Bibliographic Details
Corporate Authors: IEEE Workshop on Micro Electro Mechanical Systems Nagoya, Japan, IEEE Robotics and Automation Society, American Society of Mechanical Engineers. Dynamic Systems and Control Division, Micromachine Center (Japan)
Format: Conference Proceeding Book
Language:English
Published: [New York, N.Y.] : Piscataway, N.J. : Institute of Electrical and Electronics Engineers ; IEEE Service Center, [1997]
Subjects:
Electromechanical devices > Congresses.
Microelectronics > Congresses.
Detectors > Congresses.
Actuators > Congresses.
Description
Item Description:"IEEE catalog number 97CH36021"--Title page verso.
Physical Description:xxiv, 545 pages : illustrations ; 30 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:078033745X (casebound)
0780337441 (softbound)
0780337468 (microfiche)