http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Proceedings of the International Conference on Ion Implantation Technology
International Conference on Ion Implantation Technology proceedings <1998->
International Conference on Ion Implantation Technology.
Institute of Electrical and Electronics Engineers
Description based on: 11th (June 16-21, 1996).
International Conference on Ion Implantation: Equipment and Techniques.