rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Ion implantation technology
  title info:
    title: Proceedings of the International Conference on Ion Implantation Technology
  title info:
    title: Proceedings <1998->
  title info:
    title: IIT ... <1998->
  title info:
    title: International Conference on Ion Implantation Technology proceedings <1998->
  name:
    name part: International Conference on Ion Implantation Technology.
    role:
      role term: creator
  name:
    name part: Institute of Electrical and Electronics Engineers
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: nju
    date issued: 198u
    date issued: 9999
    issuance: continuing
    frequency: Biennial
  language:
    language term: eng
  physical description:
    form: print
    extent: volumes : illustrations ; 27-28 cm.
  note: Description based on: 11th (June 16-21, 1996).
  note: Also issued online.
  subject:
    topic: Ion implantation
    genre: Congresses
  subject:
    topic: Semiconductors
    genre: Congresses
  subject:
    topic: Semiconductor doping
    genre: Congresses
  classification: TK7871.85 I58642
  classification: 621.38152 In86i
  related item:
    title info:
      title: Ion Implantation
    name:
      name part: International Conference on Ion Implantation: Equipment and Techniques.
  related item:
    title info:
      title: AIP conference proceedings ; no. 1066
  record info:
    record content source: CUY
    record creation date: 970516
    record change date: 20151006063415.0
    record identifier: in00001355669