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Ion implantation technology ...

Bibliographic Details
Previous Title:International Conference on Ion Implantation: Equipment and Techniques. Ion Implantation
Corporate Authors: International Conference on Ion Implantation Technology, Institute of Electrical and Electronics Engineers
Format: Conference Proceeding
Language:English
Published: Piscataway, NJ : Institute of Electrical and Electronics Engineers.
Series:AIP conference proceedings ; no. 1066.
Subjects:
Ion implantation > Congresses.
Semiconductors > Congresses.
Semiconductor doping > Congresses.
Description
Item Description:Description based on: 11th (June 16-21, 1996).
Physical Description:volumes : illustrations ; 27-28 cm.
Also issued online.
Publication Frequency:Biennial