Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia /

Bibliographic Details
Corporate Author:	United States. National Bureau of Standards
Other Authors:	Nyssonen, Diana
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1984]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 480.
Subjects:	Integrated circuits > Congresses. Measurement > Congresses.

Description
Physical Description:	vi, 172 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0892525150 (pbk.)