Selected papers on optical methods in surface metrology /

Bibliographic Details
Other Authors:	Whitehouse, D. J. (David J.)
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE Optical Engineering Press, [1996]
Series:	SPIE milestone series ; v. MS 129.
Subjects:	Surfaces (Technology) > Measurement. Optical measurements.

Description
Physical Description:	xxi, 638 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and indexes.
ISBN:	0819423475 (alk. paper)