Diagnostic techniques for semiconductor materials processing II ; symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A. /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Pittsburgh, Pa. :
Materials Research Society,
[1996]
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| Series: | Materials Research Society symposia proceedings.
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| Subjects: |
| Physical Description: | xv, 585 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1558993096 (alk. paper) |