Defect recognition and image processing in semiconductors 1995 : proceedings of the sixth international conference, held in Boulder, Colorado, 3-6 December 1995 /

Bibliographic Details
Other Authors: Mickelson, Alan Rolf, 1950-
Format: Book
Language:English
Published: Bristol ; Philadelphia : Institute of Physics Pub., [1996]
Series:Institute of Physics conference series ; no. 149.
Subjects:
Description
Physical Description:xii, 369 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0750303727