1996 International Symposium on Microelectronics : 8-10 October 1996, Minneapolis Convention Center, Minneapolis, Minnesota /
| Corporate Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Reston, Va. :
ISHM-The Microelectronics Society,
[1996]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2920. |
| Subjects: |
| Physical Description: | xiii, 610 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0930815483 |