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Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: DeBusk, Damon, Chen, Ray T.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1996]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2877.
Subjects:
Semiconductors > Design and construction > Congresses.
Integrated circuits > Design and construction > Congresses.
Semiconductors > Testing > Optical methods > Congresses.
Integrated circuits > Testing > Optical methods > Congresses.
Optical pattern recognition > Congresses.
Description
Physical Description:ix, 218 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819422754