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Microelectronic manufacturing yield, reliability, and failure analysis II : 16-17 October 1996, Austin, Texas /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: Ali Keshavarzi, Prasad, Sharad, Hartmann, Hans-Dieter
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1996]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2874.
Subjects:
Microelectronics > Congresses.
Integrated circuits > Very large scale integration > Congresses.
Description
Physical Description:ix, 372 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:081942272X