Micromachining and microfabrication process technology II : 14-15 October 1996, Austin, Texas /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Sandia National Laboratories
Other Authors:	Pang, Stella W., Chang, Shih-Chia
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1996]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2879.
Subjects:	Micromechanics. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses.

Description
Physical Description:	ix, 366 pages : illustrations (some color) ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0819422770 9780819422774