rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Electrical characterization of germanium-silicon alloy
  name:
    name part: Kishore, Kumar P.
    name part: 1961-
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: xx
    date issued: 1994
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    form: remote
    extent: vii, 48 leaves : illustrations ; 28 cm.
  abstract: consisted of eight sets of peripheral metal contacts. The
  abstract: der Pauw test structures were fabricated. The fabrication
  abstract: electrically characterized using resistivity and Hall-
  abstract: Ge-Si samples were compared. In the second part, the Hall-
  abstract: mobility and carrier concentration of a representative
  abstract: mobility measurements. The samples were obtained from a n-
  abstract: no germanium. Prior to initiating the measurements, the van
  abstract: oxide patterning, deposition of aluminum metal and metal
  abstract: parts. In the first part, the resistivity of the silicon and
  abstract: patterning. Each test structure was square-shaped and
  abstract: performed using the van der Pauw technique. For comparison,
  abstract: procedure involved sputter deposition of silicon dioxide,
  abstract: results of the electrical measurements were divided into two
  abstract: Samples of strained germanium-silicon (Ge-Si) alloy were
  abstract: silicon and Ge-Si sample were each studied. The effect of
  abstract: substrate using MBE. The electrical characterization was
  abstract: temperature, sourcing current and testing configuration on
  abstract: the measured electrical parameters were studied in each case.
  abstract: the measurements were performed on control samples containing
  abstract: type Ge-Si strained epi-layer which was grown on a ptype
  note: by Kumar P. Kishore.
  note: "Major subject: Electrical Engineering".
  note: Vita.
  note: Also available online.
  note: M.S. Texas A&M University 1994.
  note: Includes bibliographical references.
  subject:
    topic: Major electrical engineering
  identifier: https://hdl.handle.net/1969.1/ETD-TAMU-1994-THESIS-K615
  related item:
    location:
      url: https://hdl.handle.net/1969.1/ETD-TAMU-1994-THESIS-K615
  record info:
    record content source: TXA
    record creation date: 960528
    record change date: 20220103134221.0
    record identifier: in00001302265