Fabrication and properties of microporous silicon /
analysis, thermo-gravimetric analysis and x-ray diffraction.
| Main Author: | |
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| Format: | Thesis eBook |
| Language: | English |
| Published: |
[Place of publication not identified] :
[publisher not identified] ;
1994.
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| Subjects: | |
| Online Access: | Link to OAKTrust copy |
| Summary: | analysis, thermo-gravimetric analysis and x-ray diffraction. and fabrication conditions has been established. Porous converts the porous silicon totally to amorphous silicon crystalline silicon and amorphous silicon dioxide. The pore dioxide. Oxidation at 600'C produces a mixture of etching of single crystalline silicon wafers in HF-ethanol examined by physical adsorption of nitrogen and the Microporous silicon layers were fabricated by electrochemical Porous silicon has the same crystalline structure as the relationship between the pore properties of porous silicon silicon also was studied by differential temperature solutions. The pore properties of porous silicon were structure and pore properties of porous silicon are stable up to 600 'C. wafer from which it was fabricated. Oxidization at 800'C |
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| Item Description: | "Major subject: Chemical Engineering". Vita. |
| Physical Description: | viii, 56 leaves : illustrations ; 28 cm. Also available online. |
| Bibliography: | Includes bibliographical references. |