Micromachined devices and components : 23-24 October, 1995, Austin, Texas /

Bibliographic Details
Corporate Authors:	Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, National Institute of Standards and Technology (U.S.)
Other Authors:	Roop, Ray, Chau, Kevin
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1995]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2642.
Subjects:	Microelectromechanical systems > Congresses. Micromechanics > Congresses.

Description
Physical Description:	ix, 296 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0819420085 9780819420084