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IEEE/SEMI International Semiconductor Manufacturing Science Symposium : [proceedings].

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Bibliographic Details
New Title:International Symposium on Semiconductor Manufacturing. Proceedings
Corporate Authors: IEEE/SEMI International Semiconductor Manufacturing Science Symposium, Institute of Electrical and Electronics Engineers, Semiconductor Equipment and Materials International
Format: Conference Proceeding
Language:English
Published: New York, NY : Institute of Electrical and Electronics Engineers, ©1989-©1993.
Subjects:
Semiconductors > Design and construction > Congresses.
Semiconductor industry > Production control > Congresses.
Semiconductor industry > Management > Congresses.
Process control > Congresses.
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Description
Published:1989-1993.
Item Description:Evans description based on: 2nd (1990).
Physical Description:5 volumes : illustrations ; 28 cm.
Publication Frequency:Annual
ISSN:1074-6935