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Bibliographic Details
New Title:International Symposium on Semiconductor Manufacturing. IEEE International Symposium on Semiconductor Manufacturing conference proceedings
Previous Title:IEEE/SEMI International Semiconductor Manufacturing Science Symposium. IEEE/SEMI International Semiconductor Manufacturing Science Symposium
Corporate Authors: International Symposium on Semiconductor Manufacturing, IEEE Electron Devices Society, Components, Packaging & Manufacturing Technology Society, Semiconductor Equipment and Materials International, Ultra Clean Society
Format: Conference Proceeding
Language:English
Published: [New York, N.Y.] : Institute of Electrical and Electronics Engineers, [1995]
Subjects:
Semiconductors > Design and construction > Congresses.
Semiconductor industry > Production control > Congresses.
Semiconductor industry > Management > Congresses.
Process control > Congresses.
Description
Published:1995.
Item Description:Title from p. ii.
Physical Description:1 volume : illustrations ; 28 cm.
Also available in PDF to subscribers via the World Wide Web.
Publication Frequency:Biennial
ISSN:1523-553X