Theory and application of laser chemical vapor deposition /
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York :
Plenum Press,
[1995]
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| Series: | Lasers, photonics, and electro-optics.
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| Subjects: |
| Physical Description: | xii, 395 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0306449366 |