http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Semiconductor industrial hygiene handbook
monitoring, ventilation, equipment and ergonomics
by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz.
Includes bibliographical references (pages 306-307) and index.
Materials science and process technology series