Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment and ergonomics /

Bibliographic Details
Main Author: Williams, Michael E., 1949-
Other Authors: Baldwin, David G., Manz, Paul C.
Format: Book
Language:English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, [1995]
Series:Materials science and process technology series.
Subjects:
Description
Physical Description:xv, 348 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages 306-307) and index.
ISBN:0815513690