Diagnostic techniques for semiconductor materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. /
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| Format: | Book |
| Language: | English |
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Pittsburgh, Pa. :
Materials Research Society,
[1994]
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| Series: | Materials Research Society symposia proceedings.
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| Item Description: | Papers presented at the symposium held as part of the 1993 Fall Meeting of the Materials Research Society in Boston, Mass. |
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| Physical Description: | xv, 505 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558992235 |