Materials Research Society. Fall Meeting & Glembocki, O. J. (1994). Diagnostic techniques for semiconductor materials processing: Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. Materials Research Society.
Chicago Style (17th ed.) CitationMaterials Research Society. Fall Meeting and O. J. Glembocki. Diagnostic Techniques for Semiconductor Materials Processing: Symposium Held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. Pittsburgh, Pa.: Materials Research Society, 1994.
MLA (9th ed.) CitationMaterials Research Society. Fall Meeting and O. J. Glembocki. Diagnostic Techniques for Semiconductor Materials Processing: Symposium Held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. Materials Research Society, 1994.
Warning: These citations may not always be 100% accurate.