Microelectronic device and multilevel interconnection technology : 25-26 October, 1995, Austin, Texas /
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1995]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2636. |
| Subjects: |
| Physical Description: | viii, 326 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819420026 |