APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers & Chen, I. (1995). Microelectronic device and multilevel interconnection technology: 25-26 October, 1995, Austin, Texas. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Ih-Chin Chen. Microelectronic Device and Multilevel Interconnection Technology: 25-26 October, 1995, Austin, Texas. Bellingham, Wash., USA: SPIE, 1995.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Ih-Chin Chen. Microelectronic Device and Multilevel Interconnection Technology: 25-26 October, 1995, Austin, Texas. SPIE, 1995.