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National Semiconductor Metrology Program
National Semiconductor Metrology Program (U.S.)
National Institute of Standards and Technology (U.S.)
Electronics and Electrical Engineering Laboratory (National Institute of Standards and Technology)
EEEL, Semiconductor Electronics Division, Office of Microelectronics Programs [as printed].
Address: National Technical Information Service, U.S. Dept. of Commerce, Attn: NTIS Order Clerk, Springfield, VA 22161.
Titles for the latest year (not cumulative) also available via Internet from the EEEL web site. Address as of 9/8/00: http://www.eeel.nist.gov/810.01/; current access is available via PURL.
Each issue cumulates from 1990 (i.e., v. for Mar. 1995 covers period 1990-1994).
National Semiconductor Metrology Program and Semiconductor Electronics Division publications
National Institute of Standards and Technology.