rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: National Semiconductor Metrology Program
    sub title: [catalog]
  name:
    name part: National Semiconductor Metrology Program (U.S.)
    role:
      role term: creator
  name:
    name part: National Institute of Standards and Technology (U.S.)
  name:
    name part: National Institute of Standards and Technology (U.S.)
    name part: Office of Microelectronics Programs.
  name:
    name part: Electronics and Electrical Engineering Laboratory (National Institute of Standards and Technology)
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: mdu
    date issued: 1995
    date issued: 9999
    issuance: continuing
    frequency: Annual
  language:
    language term: eng
  physical description:
    form: print
    extent: volumes ; 28 cm.
  note: EEEL, Semiconductor Electronics Division, Office of Microelectronics Programs [as printed].
  note: Address: National Technical Information Service, U.S. Dept. of Commerce, Attn: NTIS Order Clerk, Springfield, VA 22161.
  note: Title from cover.
  note: Titles for the latest year (not cumulative) also available via Internet from the EEEL web site. Address as of 9/8/00: http://www.eeel.nist.gov/810.01/; current access is available via PURL.
  note: Each issue cumulates from 1990 (i.e., v. for Mar. 1995 covers period 1990-1994).
  subject:
    geographic code: n-us---
  subject:
    topic: Semiconductors
    topic: Measurement
    genre: Bibliography
    genre: Catalogs
  subject:
    name:
      name part: National Semiconductor Metrology Program (U.S.)
    genre: Bibliography
    genre: Catalogs
  classification: QC100 .U57 subser
  classification: 016.6213815
  classification: C 13.37:103/
  related item:
    title info:
      title: National Semiconductor Metrology Program and Semiconductor Electronics Division publications
  related item:
    title info:
      title: Semiconductor measurement technology
    name:
      name part: National Institute of Standards and Technology.
    identifier: (DLC) 93646529
    identifier: (OCoLC)28820428
  related item:
    title info:
      title: NIST list of publications ; 103
  identifier: sn 95027357
  identifier: https://purl.fdlp.gov/GPO/LPS1622
  related item:
    location:
      url: https://purl.fdlp.gov/GPO/LPS1622
  record info:
    record content source: GPO
    record creation date: 950522
    record change date: 20230331145031.0
    record identifier: in00001246430